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Microelectromechanical systems--materials and devices II : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A. /

Microelectromechanical systems--materials and devices II : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A. / editors, Srikar Vengallatore ... [et al.] - Warrendale, PA : Materials Research Society, 2009 - xi, 247 p. : ill. ; 24 cm. - Materials Research Society symposium proceedings ; v. 1139 . - Materials Research Society symposia proceedings ; v. 1139 .

Includes bibliographical references and indexes

ISBN: 9781605111117 1605111112

Subjects--Topical Terms:
Microelectromechanical systems--Materials--Congresses
Microelectromechanical systems--Congresses
Thin films--Congresses
Nanostructured materials--Congresses
Silicon--Congresses

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