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Nanopatterning--from ultralarge-scale integration to biotechnology : symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A. /

Nanopatterning--from ultralarge-scale integration to biotechnology : symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A. / editors, Lhadi Merhari ... [et al.] - Warrendale, Pa. : Materials Research Society, 2002 - xiii, 338 p. : ill. ; 24 cm. - Materials Research Society symposium proceedings ; v. 705 . - Materials Research Society symposium proceedings ; v. 705 .

Includes bibliographical references and index

ISBN: 9781558996410 1558996419

Subjects--Topical Terms:
Nanostructures--Congresses
Nanotechnology--Congresses
Microlithography--Congresses
Integrated circuits--Ultra large scale integration--Congresses
Biotechnology--Congresses

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