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Electromechanics and MEMS /

Jones, T. B.

Electromechanics and MEMS / Thomas B. Jones, Nenad G. Nenadic. - New York : Cambridge University Press, 2013 - xx, 559 p. : ill. ; 26 cm.

Includes bibliographical references and index

ISBN: 9780521764834 0521764831

Subjects--Topical Terms:
Microelectromechanical systems

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