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Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A. /

Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A. / editors, Vincent M. Donnelly, Irving P. Herman, Masataka Hirose - Pittsburgh, Pa. : Materials Research Society, 1987 - xix, 826 p. : ill. ; 24 cm. - Materials Research Society symposia proceedings, v. 75 0272-9172 ; . - Materials Research Society symposia proceedings ; v. 75 .

Includes bibliographies and indexes

ISBN: 9780931837418 0931837413

Subjects--Topical Terms:
Materials--Effect of radiation on--Congresses
Surface chemistry--Congresses
Lasers--Industrial applications--Congresses
Photon beams--Industrial applications--Congresses
Plasma etching--Congresses

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