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Advanced mechatronics and MEMS devices /

Advanced mechatronics and MEMS devices / editor by Dan Zhang - New York : Springer, c2013 - xi, 249 p. : ill. (some col.) ; 24 cm. - Microsystems ; 23 . - Microsystems ; 23 .

Includes bibliographical references and index

ISBN: 9781441999849 1441999841

Subjects--Topical Terms:
Microelectromechanical systems
Mechatronics

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