Technology evolution for silicon nano-electronics : selected, peer reviewed papers from the proceedings of the International Symposium on Technology Evolution for Silicon Nano-Electronics 2010, June 3-5, 2010, Tokyo Institute of Technology, Tokyo, Japan /
Technology evolution for silicon nano-electronics : selected, peer reviewed papers from the proceedings of the International Symposium on Technology Evolution for Silicon Nano-Electronics 2010, June 3-5, 2010, Tokyo Institute of Technology, Tokyo, Japan /
Proceedings of the International Symposium on Technology Evolution for Silicon Nano-Electronics
edited by Seiichi Miyazaki and Hitoshi Tabata
- Stafa-Zurich, Switzerland : Trans Tech, 2011
- xi, 234 p. : ill. ; 25 cm.
- Key engineering materials, v. 470 1013-9826 ; .
- Key engineering materials ; v. 470 .
Includes bibliographical references and index
9783037850510 (pbk.)
Nanoelectronics--Congresses
Nanostructured materials--Congresses
Metal oxide semiconductors--Congresses
Includes bibliographical references and index
9783037850510 (pbk.)
Nanoelectronics--Congresses
Nanostructured materials--Congresses
Metal oxide semiconductors--Congresses