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NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore /

NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore / edited by Lynn Khine and Julius M. Tsai - Durnten-Zurich : Trans Tech, 2011 - x, 229 p. : ill. ; 25 cm. - Advanced materials research, v. 254 1022-6680 ; . - Advanced materials research ; v. 254 .

Includes bibliographical references and index

ISBN: 9783037851456 (pbk.)

Subjects--Topical Terms:
Nanoelectromechanical systems--Congresses
Microelectromechanical systems--Congresses

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