Materials issues in novel Si-based technology : symposium held November 26-28, 2001, Boston, Massachusetts, U.S.A. /
Materials issues in novel Si-based technology : symposium held November 26-28, 2001, Boston, Massachusetts, U.S.A. /
editors, William G. En ... [et al.]
- Warrendale, PA : Materials Research Society, 2002
- xi, 280 p. : ill. ; 24 cm.
- Materials Research Society symposium proceedings ; v. 686 .
- Materials Research Society symposium proceedings ; v. 686 .
"Papers presented at Symposium A, "Materials Issues in Novel Si-Based Technology," held ... at the 2001 MRS Fall Meeting"--P. xi
Includes bibliographical references and index
9781558996229 (hbk.)
Silicon--Optical properties--Congresses
Semiconductors--Materials--Congresses
Integrated circuits--Materials--Congresses
Logic circuits--Congresses
Dielectrics--Congresses
"Papers presented at Symposium A, "Materials Issues in Novel Si-Based Technology," held ... at the 2001 MRS Fall Meeting"--P. xi
Includes bibliographical references and index
9781558996229 (hbk.)
Silicon--Optical properties--Congresses
Semiconductors--Materials--Congresses
Integrated circuits--Materials--Congresses
Logic circuits--Congresses
Dielectrics--Congresses