Production planning and control for semiconductor wafer fabrication facilities : modeling, analysis, and systems /
Mönch, Lars
Production planning and control for semiconductor wafer fabrication facilities : modeling, analysis, and systems / Lars Mönch, John W. Fowler, Scott J. Mason - New York : Springer, c2013 - xii, 288 p. : ill. (some col.) ; 24 cm. - Operations research/computer science interfaces series ; vol. 52 . - Operations research/computer science interfaces series ; vol. 52 .
Includes bibliographical references and index
9781461444718
Semiconductors--Design and construction
Semiconductor wafers--Design and construction
Production planning
Production planning and control for semiconductor wafer fabrication facilities : modeling, analysis, and systems / Lars Mönch, John W. Fowler, Scott J. Mason - New York : Springer, c2013 - xii, 288 p. : ill. (some col.) ; 24 cm. - Operations research/computer science interfaces series ; vol. 52 . - Operations research/computer science interfaces series ; vol. 52 .
Includes bibliographical references and index
9781461444718
Semiconductors--Design and construction
Semiconductor wafers--Design and construction
Production planning