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Nano-tribology and materials in MEMS /

Nano-tribology and materials in MEMS / Sujeet K. Sinha, N. Satyanarayana, Seh Chun Lim, editors - Berlin : Springer, 2013 - viii, 275 p. : ill. (some col.) ; 24 cm.

Includes bibliographical references and index

ISBN: 9783642369346

Subjects--Topical Terms:
Tribology
Microelectromechanical systems
Nanotechnology

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