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Microelectronics to nanoelectronics : materials, devices & manufacturability /

Microelectronics to nanoelectronics : materials, devices & manufacturability / editor, Anupama B. Kaul - Boca Raton, FL : CRC Press, 2013 - xxiii, 407 p., [32] p. of plates : ill. (some col.) ; 24 cm.

Includes bibliographical references and index

ISBN: 9781466509542

Subjects--Topical Terms:
Nanotechnology
Microelectronics
Nanoelectronics

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