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Hermeticity testing of MEMS and microelectronic packages /

Costello, Suzanne

Hermeticity testing of MEMS and microelectronic packages / Suzanne Costello, Marc P.Y. Desmulliez - Boston, MA : Artech House, 2013 - 195 p. : ill. ; 24 cm. - Integrated microsystems series . - Integrated microsystems series .

Includes bibliographical references and index

ISBN: 9781608075270

Subjects--Topical Terms:
Microelectromechanical systems
Microelectronics
Microelectromechanical systems--Testing
Microelectronics--Testing

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