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Materials processing by cluster ion beams : history, technology, and applications /

Yamada, Isao

Materials processing by cluster ion beams : history, technology, and applications / Isao Yamada - Boca Raton, FL : CRC Press , 2015 - xv, 244 p. : ill. ; 24 cm.

Includes bibliographical references and index

ISBN: 9781498711753

Subjects--Topical Terms:
Materials--Effect of radiation on
Ion bombardment
Nanostructured materials
Silicon--Effect of radiation on

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