MEMS cost analysis : from laboratory to industry /
Lawes, Ronald A.
MEMS cost analysis : from laboratory to industry / Microelectromechanical systems cost analysis Ron Lawes - Singapore : Pan Stanford, 2014 - xvi, 289 p. : ill. ; 24 cm.
Includes bibliographical references and index
1. The world of MEMS -- 2. Basic fabrication processes -- 3. Surface micromachining -- 4. High-aspect-ratio micromachining -- 5. MEMS testing -- 6. MEMS packaging -- 7. Clean rooms, buildings and plant -- 8. The MEMSCOST spreadsheet -- 9. Product costs : accelerometers -- 10. Product costs : microphones -- 11. MEMS foundries -- 12. Financial reporting and analysis -- 13. Conclusions
9789814411066 (hbk.)
Microelectromechanical systems--Design and construction--Costs
Microelectromechanical systems industry--Costs
MEMS cost analysis : from laboratory to industry / Microelectromechanical systems cost analysis Ron Lawes - Singapore : Pan Stanford, 2014 - xvi, 289 p. : ill. ; 24 cm.
Includes bibliographical references and index
1. The world of MEMS -- 2. Basic fabrication processes -- 3. Surface micromachining -- 4. High-aspect-ratio micromachining -- 5. MEMS testing -- 6. MEMS packaging -- 7. Clean rooms, buildings and plant -- 8. The MEMSCOST spreadsheet -- 9. Product costs : accelerometers -- 10. Product costs : microphones -- 11. MEMS foundries -- 12. Financial reporting and analysis -- 13. Conclusions
9789814411066 (hbk.)
Microelectromechanical systems--Design and construction--Costs
Microelectromechanical systems industry--Costs