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Smart sensors and MEMS : intelligent devices and microsystems for industrial applications /

Smart sensors and MEMS : intelligent devices and microsystems for industrial applications / edited by Stoyan Nihtianov and Antonio Luque - Oxford, UK : Woodhead Publishing, 2014 - xxii, 538 p. : ill. ; 24 cm. - Woodhead Publishing series in electronic and optical materials, v. 51 2050-1501 ; . - Woodhead Publishing series in electronic and optical materials, v. 51 .

Includes bibliographical references and index

ISBN: 9780857095022 (hbk.)

Subjects--Topical Terms:
Detectors--Industrial applications
Microelectromechanical systems--Industrial applications

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