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Photopolymers : photoresist materials, processes, and applications /

Nakamura, Kenichiro

Photopolymers : photoresist materials, processes, and applications / Kenichiro Nakamura - Boca Raton, FL : CRC Press, c2015 - ix, 179 p. : ill. ; 24 cm. - Optics and photonics ; v. 10 .

Includes bibliographical references and index

ISBN: 9781466517288 (hbk.)

Subjects--Topical Terms:
Photopolymers
Photoresists
Photopolymerization
Photopolymers--Industrial applications
Microelectronics--Materials

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