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MEMS and nanotechnology for gas sensors /

Roy, Sunipa

MEMS and nanotechnology for gas sensors / Sunipa Roy and Chandan Kumar Sarkar - Boca Raton, FL : CRC Press, Taylor & Francis Group, 2016 - xvii, 224 p. : ill. ; 24 cm.

Includes bibliographical references and index

ISBN: 9781498700122 (hbk.)

Subjects--Topical Terms:
Gas detectors--‬Design and construction
Microelectromechanical systems--Design and construction
Microfabrication
Nanomanufacturing

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