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Nanoscale silicon devices /

Nanoscale silicon devices / edited by Shunri Oda, David K. Ferry - Boca Raton : CRC Press, 2016 - xi, 288 p. : ill. ; 24 cm.

Includes bibliographical references and index

ISBN: 9781482228670

Subjects--Topical Terms:
Nanoelectromechanical systems
Nanotechnology
Silicon crystals--Electric properties

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