Crystal growth and evaluation of silicon for VLSI and ULSI /
Eranna, G.
Crystal growth and evaluation of silicon for VLSI and ULSI / Golla Eranna - Boca Raton : CRC Press, Taylor & Francis Group, 2015 - xvii, 141 p. : ill. ; 26 cm.
Includes bibliographical references and index
9781482232813 (hbk.) 1482232812
Integrated circuits--Ultra large scale integration--Materials
Silicon crystals--Testing
Crystal growth
Semiconductor wafers--Materials
Crystal growth and evaluation of silicon for VLSI and ULSI / Golla Eranna - Boca Raton : CRC Press, Taylor & Francis Group, 2015 - xvii, 141 p. : ill. ; 26 cm.
Includes bibliographical references and index
9781482232813 (hbk.) 1482232812
Integrated circuits--Ultra large scale integration--Materials
Silicon crystals--Testing
Crystal growth
Semiconductor wafers--Materials