VLSI Micro- and nanophotonics: science, technology, and applications/
Lee, El-Hang,
VLSI Micro- and nanophotonics: science, technology, and applications/ El-Hang Lee - 1 online resource
9781315221328
Microelectromechanical systems -- Technological innovations.
Nanophotonics -- Technological innovations.
Integrated circuits -- Very large scale integration.
VLSI Micro- and nanophotonics: science, technology, and applications/ El-Hang Lee - 1 online resource
9781315221328
Microelectromechanical systems -- Technological innovations.
Nanophotonics -- Technological innovations.
Integrated circuits -- Very large scale integration.