VLSI Micro- and nanophotonics: science, technology, and applications/

Lee, El-Hang,

VLSI Micro- and nanophotonics: science, technology, and applications/ El-Hang Lee - 1 online resource

9781315221328


Microelectromechanical systems -- Technological innovations.
Nanophotonics -- Technological innovations.
Integrated circuits -- Very large scale integration.

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