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MEMS : field models and optimal design / \

Di Barba, Paolo,

MEMS : field models and optimal design / \ Paolo Di Barba, Slawomir Wiak - 1 online resource - Lecture notes in electrical engineering . - Lecture notes in electrical engineering .

Includes bibliographical references

ISBN: 9783030214968

Subjects--Topical Terms:
Microelectromechanical systems
Microelectromechanical systems--Design and construction
Microelectromechanical systems--Mathematical models

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