Evaluation of glass nano/microstructures replication fidelity after laser-assisted hot embossing process / (Record no. 100180)

MARC details
000 -LEADER
fixed length control field 05259ntm a2200373 i 4500
003 - CONTROL NUMBER IDENTIFIER
control field MY-KuUP
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20251125110820.0
006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS
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007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION
fixed length control field ta
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 231120t20232023my a|||fr|||| 000 0 eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number THE0009790 (Local)
Qualifying information Hardback
040 ## - CATALOGING SOURCE
Original cataloging agency UMP
Language of cataloging eng
Transcribing agency UMP
Description conventions rda
090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN)
Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) FTKPM .H45 2023 r Thesis
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Helen Lee May Shian,
Relator term author.
245 10 - TITLE STATEMENT
Title Evaluation of glass nano/microstructures replication fidelity after laser-assisted hot embossing process /
Statement of responsibility, etc. Helen Lee May Shian
264 #1 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE
Place of production, publication, distribution, manufacture Kuantan, Pahang :
Name of producer, publisher, distributor, manufacturer UMP,
Date of production, publication, distribution, manufacture, or copyright notice 2023
264 #4 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE
Date of production, publication, distribution, manufacture, or copyright notice ©2023
300 ## - PHYSICAL DESCRIPTION
Extent xviii, 112 pages :
Other physical details illustrations (some color) ;
Dimensions 30 cm. +
Accompanying material 1 CD ROM
336 ## - CONTENT TYPE
Source rdacontent
Content type term text
336 ## - CONTENT TYPE
Source rdacontent
Content type term text
337 ## - MEDIA TYPE
Source rdamedia
Media type term unmediated
337 ## - MEDIA TYPE
Source rdamedia
Media type term computer
338 ## - CARRIER TYPE
Source rdacarrier
Carrier type term volume
338 ## - CARRIER TYPE
Source rdacarrier
Carrier type term computer disc
347 ## - DIGITAL FILE CHARACTERISTICS
Source rda
File type text file
Encoding format PDF
500 ## - GENERAL NOTE
General note Faculty of Manufacturing and Mechatronic Engineering Technology
502 ## - DISSERTATION NOTE
Dissertation note Thesis (Master of Science) -- Universiti Malaysia Pahang – 2023
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc. note Includes bibliographical references
520 3# - SUMMARY, ETC.
Summary, etc. Micro/nanostructured glass allows the realization of many optical devices potentially exploited in numerous applications, such as in the field of imaging, point-of-care testing (POCT) for medical diagnostics, bio-inspired surfaces, and biosensors. Hot embossing is a simple, low-cost and efficient method for fabricating glass micro/nanostructures. Nevertheless, the existing hot embossing process suffers from a long thermal cycle, poor replication fidelity, especially for sub-micron features, and excessive glass thickness reduction. To date, it is still challenging to fabricate glass-based micro/nanodevices of high quality efficiently by using conventional hot embossing. To improve the process, the application of an external source to supplement the hot embossing process, such as ultrasonic, electrical, or laser-assisted means is gaining interest. Despite the potentials of laser-assisted hot embossing as a direct, rapid, and large area patterning method, its realization for practical application is still challenging. Various parameters need to be considered during the laser-assisted hot embossing process, including laser energy density, laser scanning speed, imprinting load and preheating temperature. This study proposed a laser-assisted hot embossing method that enables rapid imprinting of various micro and nanoscale patterns on K-PG375 optical glass substrates, with a shorter overall thermal cycle. The effect of laser-assisted scanning hot embossing parameters on the embossed glass pattern width, height and shape was investigated. Furthermore, the effects of mold pattern aspect ratio on the replication height of the embossed glass was analyzed. This method utilized the synergy of silicon mold high transmittance and strong optical absorption of glass at wavelength of 10.6 μm. The glass absorbed photon energy provided substantial heating of the glass surfaces, thus reducing the glass surface viscosity and accelerating the glass material filling in micro/nanostructure mold cavities. The results revealed that by controlling related parameters, such as laser scanning speed, preheating temperature, and pressing load, various high-resolution periodic grating, hole, and pillar patterns can be obtained. Pattern width ranging from 225 nm up to 50 μm, was successfully copied to the glass surface with a very short contact pressing time, instantaneously after each laser pass. Pattern transfer occurred when the scanning speed varied between 5 mm/s and 25 mm/s, preheating temperature in the range of 320℃ to 335℃ and moderate load in the range of 0.2 MPa to 0.5 MPa. It was found that the filling ratio improved as the scanning speed decreased. At a scanning speed of 30 mm/s, the replication failed due to insufficient temperature rise at the glass surface. When the scanning speed was reduced to 1 mm/s, several problems such as excessive deformation in the bulk glass and strong stiction of glass to the mold after demolding or glass cracking was observed. It was clearly observed that, as the aspect ratio increased, the average replication height of embossed glass decreased. As proof of concept, the optical performance of fabricated glass as diffractive optical elements and optical filter for guided mode resonant was also demonstrated. The measured diffractive grating spacing and order after illuminated by laser source were in good agreement with the theoretical calculation. In the latter, the utility of laser-assisted, imprinted glass nanostructures as guided mode resonant (GMR) optical filter was evaluated. The peak spectral values obtained were satisfactory, which yielded an average full width at half maximum (FWHM) and peak wavelength value (PWV) of 4.6 nm and 691.39 nm, respectively. Overall, the proposed method enabled a simple, low-cost, high-throughput approach for the fabrication of fine patterns on glass for various optical applications.
610 20 - SUBJECT ADDED ENTRY--CORPORATE NAME
Corporate name or jurisdiction name as entry element Faculty of Manufacturing and Mechatronic Engineering Technology
General subdivision Dissertations
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Universities and colleges
General subdivision Dissertations
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Theses
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Source of classification or shelving scheme Library of Congress Classification
Koha item type Thesis
Holdings
Withdrawn status Lost status Source of classification or shelving scheme Damaged status Not for loan Collection Home library Current library Date acquired Total checkouts Full call number Barcode Date last seen Copy number Price effective from Koha item type
  Not lost Library of Congress Classification   Not for loan Reference UMPLIB PEKAN UMPLIB PEKAN 20/11/2023   FTKPM .H45 2023 r Thesis T000002788 20/11/2023 1 20/11/2023 Thesis
  Not lost Library of Congress Classification     Non-fiction UMPLIB PEKAN UMPLIB PEKAN 21/11/2023   CD13468 T000002789 21/11/2023 1 21/11/2023 Thesis

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