MARC details
| 000 -LEADER |
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| fixed length control field |
02075nam a2200265 a 4500 |
| 001 - CONTROL NUMBER |
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| control field |
vtls000052423 |
| 003 - CONTROL NUMBER IDENTIFIER |
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| control field |
KUKTEM |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
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| control field |
20251114204446.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
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| fixed length control field |
110329t2010 my a f m 000 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
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| International Standard Book Number |
THE0006607(Local) |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
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| Level of rules in bibliographic description |
201905161136 |
| Level of effort used to assign nonsubject heading access points |
amirul |
| Level of effort used to assign subject headings |
201110040956 |
| Level of effort used to assign classification |
Fida |
| Level of effort used to assign subject headings |
201107140041 |
| Level of effort used to assign classification |
VLOAD |
| Level of effort used to assign subject headings |
201103291041 |
| Level of effort used to assign classification |
ida |
| -- |
201103291027 |
| -- |
ida |
| 040 ## - CATALOGING SOURCE |
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| Original cataloging agency |
UMP |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
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| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TJ1191.5 .Y66 2010 rs Bc. |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
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| Personal name |
Yong, Chee Ping |
| 245 10 - TITLE STATEMENT |
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| Title |
Feasible laser parameters in fabrication of MEMS structures on silicon / |
| Statement of responsibility, etc. |
Yong Chee Ping |
| 246 3# - VARYING FORM OF TITLE |
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| Title proper/short title |
Feasible laser parameters in fabrication of MEMS structures on silicon |
| Medium |
[computer file] |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
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| Place of publication, distribution, etc. |
Kuantan, Pahang : |
| Name of publisher, distributor, etc. |
UMP, |
| Date of publication, distribution, etc. |
2010 |
| 300 ## - PHYSICAL DESCRIPTION |
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| Extent |
xvi, 42 p. : |
| Other physical details |
ill. (some col.) ; |
| Dimensions |
30 cm. + |
| Accompanying material |
1 computer discs |
| 502 ## - DISSERTATION NOTE |
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| Dissertation note |
Project paper (Bachelor of Mechanical Engineering) -- Universiti Malaysia Pahang - 2010 |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
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| Bibliography, etc. note |
Bibliography : p. 40 |
| 520 3# - SUMMARY, ETC. |
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| Summary, etc. |
The technique of making MEMS structures are kept improving which from old fashion with high cost machine to very advanced one to save time and labor cost. In this report, laser machining of silicon using ND:YAG is introduced. The main objectives are generating MEMS structures on silicon wafer by using laser micromachining and the effects of parameters of laser micromachining on silicon.STATISTICA is used to design and analyze the experiments. Two experimental sets: (1) laser processing with assist gas and (2)laser processing without assist gas were carried out. Basic feature of MEMS and micro spots were generated. The micro features were investigated under SEM. Experimental results were analyzed in STATISTICA. Analyzed results show that laser power is the most significant effect followed by pulse width and the assist gas on the micro feature size and particularly feature quality. It was found that laser processing without assist gas produce promising results. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
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| Topical term or geographic name entry element |
Micromachining |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
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| Topical term or geographic name entry element |
Microelectromechanical systems |