Handbook of photomask manufacturing technology / edited by Syed Rizvi

Material type: Text

TextPublication details: Boca Raton: Taylor & Francis, 2005Description: xxiii, 704 p.: ill.; 26 cmISBN:

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Reference	UMPLIB PEKAN	TK7872.M3 H36 2005 r (Browse shelf(Opens below))	Not for loan		0000014837

Includes bibliographical references and index