Developments in surface contamination and cleaning / editors by Rajiv Kohli, Kashmiri L. Mittal

Contributor(s): Material type: TextTextPublication details: Waltham, MA : William Andrew, <2011->Description: v. <3-5, 7> : ill. ; 24 cmISBN:
  • 9781437778854 (v.3)
  • 9781437778830 (v.4)
  • 9781437778816 (v.5)
  • 9780323313032 (v. 7)
Subject(s):
Incomplete contents:
v. 3. Methods for removal of particle contaminants -- v. 4. Detection, characterization, and analysis of contaminants -- v. 5. Contaminant removal and monitoring -- v. 7 Cleanliness validation and verification
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Holdings
Item type Current library Call number Copy number Status Notes Date due Barcode
Reference Reference UMPLIB PEKAN TA418.7 .D48 2011 r | TA418.7 .D48 2011 (Browse shelf(Opens below)) 1 Not for loan v.7 0000104010
Open Shelf Open Shelf UMPLIB PEKAN TA418.7 .D48 2011 (Browse shelf(Opens below)) 1 Available v.3 0000073864
Open Shelf Open Shelf UMPLIB PEKAN TA418.7 .D48 2011 (Browse shelf(Opens below)) 1 Available v.4 0000073346
Open Shelf Open Shelf UMPLIB PEKAN TA418.7 .D48 2011 (Browse shelf(Opens below)) 1 Available v.5 0000073345

Includes bibliographical references and index

v. 3. Methods for removal of particle contaminants -- v. 4. Detection, characterization, and analysis of contaminants -- v. 5. Contaminant removal and monitoring -- v. 7 Cleanliness validation and verification

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