MEMS mechanical sensors / Stephen Beeby ... [et al.]

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Material type: Text

TextSeries: Microelectromechanical systems seriesPublication details: Boston : Artech House, 2004Description: 269 p. : ill. ; 26 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TK7875 .M53 2004 (Browse shelf(Opens below))	1	Available		0000024502