Nano-lithography / edited by Stefan Landis

Contributor(s):

Landis, Stefan

Material type: Text

TextPublication details: London, UK : ISTE ; Hoboken, NJ : Wiley, 2011Description: xxv, 325 p. : ill. ; 24 cmISBN:

9781848212114
1848212119

Uniform titles:

Nanolithography English

Subject(s):

Contents:

Ch. 1. X-ray lithography : fundamentals and applications -- ch. 2. NanoImprint lithography -- ch. 3. Lithography techniques using scanning probe microscopy -- ch. 4. Lithography and manipulation based on the optical properties of metal nanostructures -- ch. 5. Patterning with self-assembling block copolymers -- ch. 6. Metrology for lithography

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Holdings ( 1 )
Title notes ( 2 )

Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB GAMBANG	TK7872.M3 N36 2011 (Browse shelf(Opens below))	1	Available		0000062009

Includes bibliographical references and index