Microelectromechanical systems--materials and devices III : symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A. / editors, Jörg Bagdahn ... [et al.]
Material type:
TextSeries: Materials Research Society symposia proceedings ; v. 1222Publication details: Warrendale, PA : Materials Research Society, 2010Description: ix, 211 p. : ill. ; 24 cmISBN: - 9781605111957
- 1605111953
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
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UMPLIB PEKAN | TK7875 .M53 2010 (Browse shelf(Opens below)) | 1 | Available | 0000072126 |
Includes bibliographical references and indexes