Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A. / editors, Tomas Diaz de la Rubia ... [et al.]
Material type:
TextSeries: Materials Research Society symposia proceedings ; v. 469Publication details: Pittsburgh, PA : Materials Research Society, 1997Description: xv, 541 p. : ill. ; 24 cmISBN: - 978155899373
- 1558993738
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
Open Shelf
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UMPLIB PEKAN | TK7871.85 .D44 1997 (Browse shelf(Opens below)) | 1 | Available | 0000068175 |
Includes bibliographical references and index