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Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A. / editors, B.J. Pawlak ... [et al.]
Material type:
TextSeries: Materials Research Society symposia proceedings ; v. 1070Publication details: Warrendale, PA : Materials Research Society, c2008Description: xi, 319 p. : ill. ; 24 cmISBN: - 9781605110400
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
Open Shelf
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UMPLIB GAMBANG | TK7871.85 .D67 2008 (Browse shelf(Opens below)) | 1 | Available | 0000070691 |
Includes bibliographical references and indexes