@book{104036,
	author = {Singh, Kamaljeet, and Karmakar, Ayan,},
	title = {Micro Electro Mechanical System (MEMS) technology for multifaceted applications /},
	publisher = {Springer,},
	year = {2025},
	address = {Singapore :},
	url = {https://link-springer-com.libraryumpsa.idm.oclc.org/book/10.1007/978-981-96-6162-6}
}