Singh, Kamaljeet, <br/><br/>
Micro Electro Mechanical System (MEMS) technology for multifaceted applications / 
Kamaljeet Singh , Ayan Karmakar 
 - 1 online resource 
<br/><br/>Includes bibliographical references 
<br/><br/><label>ISBN: </label>9789819661626 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical system