TY  - BOOK
AU  - Singh,Kamaljeet
AU  - Karmakar, Ayan,
TI  - Micro Electro Mechanical System (MEMS) technology for multifaceted applications
SN  - 9789819661626
PY  - 2025///
CY  - Singapore
PB  - Springer
KW  - Microelectromechanical system
N1  - Includes bibliographical references
UR  - https://link-springer-com.libraryumpsa.idm.oclc.org/book/10.1007/978-981-96-6162-6
UR  - https://link.springer.com/openurl?genre=book&isbn=978-981-96-6162-6
ER  -