TY  - ADVS
TI  - Nanometrology: DVO8PUB12 
T2  - Manufacturing insights
SN  - MED0000534(Local)
PY  - 2009///
PB  - [Dearborne, Mich.], Society of Manufacturing Engineers
KW  - Nanostructured materials
KW  - Measurement
KW  - Microscopy
N1  - Library internal view only
N2  - Learn detailed information on the two major types of microscopes in use today, which are based on either an energy beam made up of electrons or ions, or a scanning probe with a sharp tip. The energy beam methods may use electrons, such as in an S-E-M (scanning electron microscope), and the T-E-M (transmission electron microscope), or they may use ionized atoms, such as in the F-I-B (focused ion beam). The scanning probes include the  S-T-M (scanning tunneling microscopy), and the A-F-M (atomic force microscopy)
ER  -