Handbook of semiconductor manufacturing technology / 
edited by Yoshio Nishi, Robert Doering; assistant editor Tim Wooldridge 
 - New York :  Marcel Dekker,  2000 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0824787838 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction--Handbooks, manuals, etc<br/>Semiconductor industry--Handbooks, manuals, etc