TY  - BOOK
AU  - Nishi,Yoshio
AU  - Doering,Robert
AU  - Wooldridge,Tim
TI  - Handbook of semiconductor manufacturing technology
SN  - 0824787838
PY  - 2000///
CY  - New York
PB  - Marcel Dekker
KW  - Semiconductors
KW  - Design and construction
KW  - Handbooks, manuals, etc
KW  - Semiconductor industry
N1  - Includes bibliographical references and index
ER  -