00571nam a2200169 4500001001400000003000700014005001700021020001500038040000800053245007600061260004300137300003600180504005000216650005000266700001600316856006900332vtls000005098KUKTEM20251117141159.0 a0824753747 aUMP00aHandbook of photomask manufacturing technology /c edited by Syed Rizvi aBoca Raton: bTaylor & Francis,c 2005 axxiii, 704 p.:b ill.;c 26 cm. aIncludes bibliographical references and index00aMasks (Electronics)xHandbooks, manuals, etc.12aRizvi, Syed48y URL link u http://www.loc.gov/catdir/toc/fy054/2004059306.html