TY  - BOOK
AU  - Rizvi,Syed
TI  - Handbook of photomask manufacturing technology
SN  - 0824753747
PY  - 2005///
CY  - Boca Raton: 
PB  - Taylor & Francis
KW  - Masks (Electronics)
KW  - Handbooks, manuals, etc
N1  - Includes bibliographical references and index
UR  -  http://www.loc.gov/catdir/toc/fy054/2004059306.html
ER  -