MEMS/NEMS handbook :  techniques and applications / 
edited by Cornelius T. Leondes 
 - New York :  Springer,  2006 
 - 5v. :  ill. ;  25 cm. 
<br/><br/>v. 1. Design methods -- v. 2. Fabrication techniques -- v. 3. Manufacturing methods -- v. 4. Sensors and actuators -- v. 5. Medical applications and MOEMS 
<br/><br/><label>ISBN: </label>0387245200 (set) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Design and construction<br/>Nanotechnology