TY  - BOOK
AU  - Leondes,Cornelius
TI  - MEMS/NEMS handbook: techniques and applications 
SN  - 0387245200 (set)
PY  - 2006///
CY  - New York
PB  - Springer
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - Nanotechnology
N1  - v. 1. Design methods -- v. 2. Fabrication techniques -- v. 3. Manufacturing methods -- v. 4. Sensors and actuators -- v. 5. Medical applications and MOEMS
ER  -