Handbook of VLSI microlithography :  principles, technology, and applications / 
edited by John Helbert. 
 - Mumbai ;  Delhi :  Jaico Publishing House,  2005 
 - xix, 1001 p. :  ill. ;  25 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>8179924750 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Very large scale integration<br/>Microlithography