Handbook of VLSI microlithography
principles, technology, and applications
Helbert, John N.
text
Mumbai
Delhi
Jaico Publishing House
2005
monographic
eng
xix, 1001 p. : ill. ; 25 cm.
edited by John Helbert.
Includes bibliographical references and index
Integrated circuits
Very large scale integration
Microlithography
8179924750
UMP
070117
20251117141220.0
vtls000017470