TY  - BOOK
AU  - Helbert,John N.
TI  - Handbook of VLSI microlithography: principles, technology, and applications 
SN  - 8179924750
PY  - 2005///
CY  - Mumbai, Delhi
PB  - Jaico Publishing House
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Microlithography
N1  - Includes bibliographical references and index
ER  -