@book{13552,
	author = {Doering, Robert,},
	title = {Handbook of semiconductor manufacturing technology /},
	publisher = {CRC Press,},
	year = {c2008.},
	address = {Boca Raton :},
	edition = {2nd ed.},
	note = {Includes bibliographical references and index.},
	url = {http://www.loc.gov/catdir/toc/ecip077/2006102599.html}
}