Handbook of semiconductor manufacturing technology / 
edited by Robert Doering, Yoshio Nishi. 
 - 2nd ed. 
 - Boca Raton :  CRC Press,  c2008. 
 - 1 v. (various pagings) :  ill. ;  27 cm. 
<br/><br/> Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>574446754 (alk. paper) 9781574446753 (alk. paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction--Handbooks, manuals, etc<br/>Semiconductor industry--Handbooks, manuals, etc.