TY  - BOOK
AU  - Doering,Robert
AU  - Nishi,Yoshio
TI  - Handbook of semiconductor manufacturing technology
SN  - 574446754 (alk. paper)
PY  - 2008///
CY  - Boca Raton
PB  - CRC Press
KW  - Semiconductors
KW  - Design and construction
KW  - Handbooks, manuals, etc
KW  - Semiconductor industry
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/toc/ecip077/2006102599.html
ER  -