Handbook of thin film technology / 
Hartmut Frey, H.R. Khan, editors 
 - Berlin :  Springer,  2015 
 - xiii, 379 p. :  ill. (some col.) ;  26 cm. 
<br/><br/>Includes biblographical references and index 
<br/><br/><label>ISBN: </label>9783642054297 (hbk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Thin films--Handbooks, manuals, etc.