TY  - BOOK
AU  - Frey,Hartmut
AU  - Khan,H.R.
TI  - Handbook of thin film technology
SN  - 9783642054297 (hbk.)
PY  - 2015///
CY  - Berlin
PB  - Springer
KW  - Thin films
KW  - Handbooks, manuals, etc
N1  - Includes biblographical references and index
ER  -