Developments in surface contamination and cleaning
Kohli, Rajiv
Mittal, K. L.
text
mau
Waltham, MA
William Andrew
<2011->
2011
monographic
eng
v. <3-5, 7> : ill. ; 24 cm.
v. 3. Methods for removal of particle contaminants -- v. 4. Detection, characterization, and analysis of contaminants -- v. 5. Contaminant removal and monitoring -- v. 7 Cleanliness validation and verification
specialized
editors by Rajiv Kohli, Kashmiri L. Mittal
Includes bibliographical references and index
Surfaces (Technology)
Surface contamination
Prevention
Particles
Measurement
Cleaning
Coatings
9781437778854 (v.3)
9781437778830 (v.4)
9781437778816 (v.5)
9780323313032 (v. 7)
UMP
121127
20251117141328.0
vtls000066946