Encyclopaedia of manufacturing techniques for microfabrication and nanotechnology / 
contributors, Guomin Jiang ... [et al.] ; edited and compiled by Auris Reference Editorial Board 
 - London, UK :  Auris Reference,  2015 
 - 4 v. :  ill. (some col.) ;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/>V.1: Fundamentals techniques in microfabrication and nanotechnology -- v.2: Microfabrication for industrial applications -- v.3: Emerging technologies in micro-nanotechnology products -- v.4: Micro and nanotechnology for space systems 
<br/><br/><label>ISBN: </label>9781781546994 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Manufacturing processes<br/>Microfabrication<br/>Nanotechnology